Abstract

Thermoreflectance is a technique for non-contact thermometry, which determines the temperature of a specimen by measuring the temperature-dependent reflectance. Due to its cost-effectiveness and simplicity compared with other non-contact techniques, such as Raman and infrared thermometries, the thermoreflectance has been widely used. If the probing laser is tightly focused, the thermoreflectance technique can be used to measure the local temperature of microstructures such as heated cantilevers. This presentation will describe our effort of applying thermoreflectance technique to (i) steady and dynamic temperature measurement of a heated microcantilever; (ii) measurement of local thickness and temperature of heated cantilevers at steady-state operation; and (iii) sub-beam size temperature measurement of doped Si heater.

Biography: Dr. Bong Jae Lee is an Associate Professor in the Department of Mechanical Engineering at the Korea Advanced Institute of Science and Technology (KAIST). Prior to joining KAIST, he has worked in the Department of Mechanical Engineering and Materials Science at the University of Pittsburgh as an Assistant Professor for three years. He received his B.S. degree in Mechanical Engineering from Seoul National University in 2001 and his M.S. and Ph.D. degrees from the Georgia Institute of Technology in 2005 and 2007, respectively. Dr. Lee was the winner of the Georgia Tech Chapter of Sigma Xi Best Ph.D. Thesis Award in 2008 and was the recipient of the Hewlett Packard Best Paper Award (2nd place) in 2007.